The Single Best Strategy To Use For Noohapou
The Single Best Strategy To Use For Noohapou
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The POU3500 technique provides dynamic temperature Charge of the method chamber cathode / electrode / anode and may be synchronized with any etch approach.
Resource & TCU software program calibration procedures vary exterior check equipment not utilised regularly for verifying
With the POU3500, you'll be able to accomplish unparalleled ends in etch functionality, chamber uptime, lessened price of ownership and fab Room utilization – all whilst improving your method reliability.
Originally Launched in 1985, our corporation has developed right into a identified leader in supplying temperature control programs to the worldwide semiconductor market.
This extraordinary process, providing a small variety aspect, affordable-of-Ownership and Dynamic Temperature Regulate offered procedure and gear engineers a completely new Device to improve their temperature sensitive processes.
The precision of your POU 3300 allows for independent control of the method fluid temperature for the wafer chuck inside of +/- 0.one read more °C of established place, as well as the quickly reaction time with the process enables for optimum wafer-to-wafer repeatability throughout the etch process.
All static TCUs involve extra cooling & heating capacities because of their extremely big process fluid reservoirs. the method fuid reservoir on LAUDA-Noah's dynamic temperature Regulate process is less than one gallon.
With the POU3300, it is possible to realize unparalleled leads to etch performance, chamber uptime, decreased price of ownership and fab Room utilization – all when improving upon your system reliability.
The data pertains to your 300mm chamber temperature profile all through a significant facet ratio Etch approach, working at incredibly substantial RF energy conditions (~3.8kW). The compelling elements of this knowledge set are:
LAUDA-Noah is Conference these new problems and has incorporated Electricity preserving technological know-how in methods that happen to be friendly for the ecosystem and have a low price to work.
the information set here is from the 200mm quantity creation wafer fab and Evidently illustrates the benefit of the LAUDA-Noah POU method.
in excess of ever, shrinking system geometries, demanding new processes plus a highly aggressive natural environment have to have temperature Command systems that combine quickly and precise temperature Handle having an emphasis on decreased operating fees and enhanced trustworthiness.
the fact is that correct Dynamic Temperature Control can only be realized when all 5 (five) of the next system layout and set up specifications are satisfied:
(as a result, installing a static unit beside chamber will likely not allow it to provide dynamic temperature control)
We demand much less cooling/heating potential for a similar application being a static TCU on account of our small reservoir volume.
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